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1

Germanium content dependence of the leakage current of recessed SiGe source/drain junctions

Eddy Roger Simoen, Mireia Bargallo Gonzalez, Geert Eneman, Peter Verheyen, Aldo Benedetti, Hugo Bender, Roger Loo, Cor Claeys

Journal:

Journal of Materials Science: Materials in Electronics

Année:

2007

Langue:

english

Fichier:

PDF, 255 KB

english, 2007

2

Detection of failure sites by focused ion beam and nano-probing in the interconnect of three-dimensional stacked circuit structures

Yang, Yu, Bender, Hugo, Arstila, Kai, Swinnen, Bart, Verlinden, Bert, Wolf, Ingrid De

Journal:

Microelectronics Reliability

Année:

2008

Langue:

english

Fichier:

PDF, 902 KB

english, 2008

3

TEM sample preparation by FIB for carbon nanotube interconnects

Xiaoxing Ke, Sara Bals, Ainhoa Romo Negreira, Thomas Hantschel, Hugo Bender, Gustaaf Van Tendeloo

Journal:

Ultramicroscopy

Année:

2009

Langue:

english

Fichier:

PDF, 1021 KB

english, 2009

4

The implant-free quantum well field-effect transistor: Harnessing the power of heterostructures

Geert Hellings, Andriy Hikavyy, Jerome Mitard, Liesbeth Witters, Brahim Benbakhti, AliReza Alian, Niamh Waldron, Hugo Bender, Geert Eneman, Raymond Krom, Andreas Schulze, Wilfried Vandervorst, Roger L

Journal:

Thin Solid Films

Année:

2012

Langue:

english

Fichier:

PDF, 1.80 MB

english, 2012

5

Site Selective Integration of III–V Materials on Si for Nanoscale Logic and Photonic Devices

Paladugu, Mohanchand, Merckling, Clement, Loo, Roger, Richard, Olivier, Bender, Hugo, Dekoster, Johan, Vandervorst, Wilfried, Caymax, Matty, Heyns, Marc

Journal:

Crystal Growth & Design

Année:

2012

Langue:

english

Fichier:

PDF, 1.38 MB

english, 2012

6

Impact of thermal treatment upon morphology and crystallinity of strontium titanate films deposited by atomic layer deposition

Popovici, Mihaela, Van Elshocht, Sven, Menou, Nicolas, Favia, Paola, Bender, Hugo, Rosseel, Erik, Swerts, Johan, Adelmann, Christoph, Vrancken, Christa, Moussa, Alain, Tielens, Hilde, Tomida, Kazuyuki

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2011

Langue:

english

Fichier:

PDF, 922 KB

english, 2011

7

TCAD Strain Calibration Versus Nanobeam Diffraction of Source/Drain Stressors for Ge MOSFETs

Buhler, Rudolf Theoderich, Eneman, Geert, Favia, Paola, Witters, Liesbeth Johanna, Vincent, Benjamin, Hikavyy, Andriy, Loo, Roger, Bender, Hugo, Collaert, Nadine, Simoen, Eddy, Martino, Joao Antonio,

Journal:

IEEE Transactions on Electron Devices

Année:

2015

Langue:

english

Fichier:

PDF, 2.01 MB

english, 2015

8

Modeling and Experiments of Boron Diffusion During Sub-Millisecond Non-Melt Laser Annealing in Silicon

Noda, Taiji, Felch, Susan, Parihar, Vijay, Vrancken, Christa, Janssens, Tom, Bender, Hugo, Vandervorst, Wilfried

Journal:

MRS Proceedings

Année:

2006

Langue:

english

Fichier:

PDF, 3.21 MB

english, 2006

9

Compressively strained SiGe band-to-band tunneling model calibration based on p-i-n diodes and prospect of strained SiGe tunneling field-effect transistors

Kao, Kuo-Hsing, Verhulst, Anne S., Rooyackers, Rita, Douhard, Bastien, Delmotte, Joris, Bender, Hugo, Richard, Olivier, Vandervorst, Wilfried, Simoen, Eddy, Hikavyy, Andriy, Loo, Roger, Arstila, Kai,

Journal:

Journal of Applied Physics

Année:

2014

Langue:

english

Fichier:

PDF, 2.68 MB

english, 2014

10

Imaging the Three-Dimensional Conductive Channel in Filamentary-Based Oxide Resistive Switching Memory

Celano, Umberto, Goux, Ludovic, Degraeve, Robin, Fantini, Andrea, Richard, Olivier, Bender, Hugo, Jurczak, Malgorzata, Vandervorst, Wilfried

Journal:

Année:

2015

Langue:

english

Fichier:

PDF, 3.90 MB

english, 2015

11

Advanced Raman Spectroscopy Using Nanofocusing of Light

Nuytten, Thomas, Bogdanowicz, Janusz, Hantschel, Thomas, Schulze, Andreas, Favia, Paola, Bender, Hugo, De Wolf, Ingrid, Vandervorst, Wilfried

Journal:

Advanced Engineering Materials

Année:

2017

Langue:

english

Fichier:

PDF, 945 KB

english, 2017

12

Bis(tri-n-alkylsilyl oxide) silicon phthalocyanines: A Start to Establishing a Structure Property Relationship as both Ternary Additives and Non-Fullerene Electron Acceptors in Bulk Heterojunction Organic Photovoltaic Devices

Dang, Minh Trung, Grant, Trevor M., Yan, Han, Seferos, Dwight, Lessard, Benoit Hugo, Bender, Timothy Paul

Journal:

Journal of Materials Chemistry A

Année:

2017

Langue:

english

Fichier:

PDF, 4.17 MB

english, 2017

13

[ECS 213th ECS Meeting - Phoenix, AZ (May 18 - May 23, 2008)] ECS Transactions - Impact of Millisecond Laser Anneal on the Thermal Stress- Induced Defect Creation in Si1-xGex Source /Drain Junctions

Bargallo Gonzalez, Mireia, Simoen, Eddy, Rosseel, Erik, Verheyen, Peter, Souriau, Laurent, Geypen, Jef, Bender, Hugo, Yves Hoffmann, Thomas, Loo, Roger, Absil, Philippe, Claeys, Cor

Année:

2008

Langue:

english

Fichier:

PDF, 423 KB

english, 2008

14

NiO Thin Films Synthesized by Atomic Layer Deposition using Ni(dmamb)2 and Ozone as Precursors

Peter Antony Premkumar, Michael Toeller, Christoph Adelmann, Johan Meersschaut, Alexis Franquet, Olivier Richard, Hilde Tielens, Bert Brijs, Alain Moussa, Thierry Conard, Hugo Bender, Marc Schaekers,

Journal:

Chemical Vapor Deposition

Année:

2012

Langue:

english

Fichier:

PDF, 966 KB

english, 2012

15

Dielectric reliability of 70 nm pitch air-gap interconnect structures

Marianna Pantouvaki, Farid Sebaai, Kristof Kellens, Danny Goossens, Bart Vereecke, Janko Versluijs, Els Van Besien, Rudy Caluwaerts, Koen Marrant, Hugo Bender, Alain Moussa, Herbert Struyf, Gerald P.

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 898 KB

english, 2011

16

Improved EOT and leakage current for metal–insulator–metal capacitor stacks with rutile TiO2

Mihaela Popovici, Min-Soo Kim, Kazuyuki Tomida, Johan Swerts, Hilde Tielens, Alain Moussa, Olivier Richard, Hugo Bender, Alexis Franquet, Thierry Conard, Laith Altimime, Sven Van Elshocht, Jorge A. Ki

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 593 KB

english, 2011

17

Al speed fill

Gerald P Beyer, Karen Maex, Stephen Daniels, Sophia Lee, Joris Proost, Hugo Bender, Moshe Judelewicz, Nirmalya Maity

Journal:

Materials Science in Semiconductor Processing

Année:

1999

Langue:

english

Fichier:

PDF, 1.24 MB

english, 1999

18

A comparative study of the microstructure–dielectric properties of crystalline SrTiO3 ALD films obtained via seed layer approach

Mihaela Popovici, Kazuyuki Tomida, Johan Swerts, Paola Favia, Annelies Delabie, Hugo Bender, Christoph Adelmann, Hilde Tielens, Bert Brijs, Ben Kaczer, Malgorzata A. Pawlak, Min-Soo Kim, Laith Altimim

Journal:

physica status solidi (a)

Année:

2011

Langue:

english

Fichier:

PDF, 632 KB

english, 2011

19

On the applicability of tougaard background subtraction to general auger spectra

Journal:

Surface and Interface Analysis

Année:

1994

Langue:

english

Fichier:

PDF, 796 KB

english, 1994

20

A tem specimen preparation technique of prespecified areas of semiconductor devices using conventional equipment

Albert Romano-Rodriguez, Jan Vanhellemont, Hugo Bender

Journal:

Micron and Microscopica Acta

Année:

1990

Langue:

english

Fichier:

PDF, 217 KB

english, 1990

21

Electrically active defects at AlN/Si interface studied by DLTS and ESR

Eddy Simoen, Domenica Visalli, Marleen Van Hove, Maarten Leys, Paola Favia, Hugo Bender, Gustaaf Borghs, Ahn Puc Duc Nguyen, Andre Stesmans

Journal:

physica status solidi (a)

Année:

2012

Langue:

english

Fichier:

PDF, 726 KB

english, 2012

22

Controlled growth of rutile TiO2 by atomic layer deposition on oxidized ruthenium

Mihaela Popovici, Johan Swerts, Kazuyuki Tomida, Dunja Radisic, Min-Soo Kim, Ben Kaczer, Olivier Richard, Hugo Bender, Annelies Delabie, Alain Moussa, Christa Vrancken, Karl Opsomer, Alexis Franquet,

Journal:

physica status solidi (RRL) - Rapid Research Letters

Année:

2011

Langue:

english

Fichier:

PDF, 810 KB

english, 2011

23

Quecksilber

E. Rupp, F. Lehmann, A. W. Bender, I. K. Strickland, F. W. Sjoström, H. Lajoux, A. Herrmann, Walter, Hugo Wastenson

Journal:

Analytical and Bioanalytical Chemistry

Année:

1918

Langue:

german

Fichier:

PDF, 258 KB

german, 1918

24

Correlation between number of walls and diameter in multiwall carbon nanotubes grown by chemical vapor deposition

Nicolò Chiodarelli, Olivier Richard, Hugo Bender, Marc Heyns, Stefan De Gendt, Guido Groeseneken, Philippe M. Vereecken

Journal:

Année:

2012

Langue:

english

Fichier:

PDF, 577 KB

english, 2012

25

Dogmas and controversies in compression therapy: Report of an International Compression Club (ICC) meeting, Brussels, May 2011

Mieke Flour, Michael Clark, Hugo Partsch, Giovanni Mosti, Jean-Francois Uhl, Michel Chauveau, Francois Cros, Pierre Gelade, Dean Bender, Anneke Andriessen, Jan Schuren, André Cornu-Thenard, Ed Arkans,

Journal:

International Wound Journal

Année:

2012

Langue:

english

Fichier:

PDF, 796 KB

english, 2012

26

The Selective Blocking of the Polymerization Reaction of Striated Muscle Actin Leading to a Derivative Suitable for Crystallization : Modification of Tyr-53 by 5-Diazonium-(1H)tetrazole

Norbert BENDER, Hugo FASOLD, Akitsugu KENMOKU, Gert MIDDELHOFF, Karl-Ernst VOLK

Journal:

Année:

1976

Langue:

english

Fichier:

PDF, 408 KB

english, 1976

27

Understanding device performance by incorporating 2D-carrier profiles from high resolution scanning spreading resistance microscopy into device simulations

Aftab Nazir, Pierre Eyben, Trudo Clarysse, Geert Hellings, Andreas Schulze, Jay Mody, Kristin De Meyer, Hugo Bender, Wilfried Vandervorst

Journal:

Solid-State Electronics

Année:

2012

Langue:

english

Fichier:

PDF, 660 KB

english, 2012

28

Selective chemical vapor synthesis of Cu3Ge: Process optimization and film properties

Antony Premkumar Peter, Laureen Carbonell, Marc Schaekers, Christoph Adelmann, Johan Meersschaut, Alexis Franquet, Olivier Richard, Hugo Bender, Tokei Zsolt, Sven van Elshocht

Journal:

Année:

2013

Langue:

english

Fichier:

PDF, 1.55 MB

english, 2013

29

Nickel silicide contacts formed by excimer laser annealing for high efficiency solar cells

Tous, Loic, Lerat, Jean-Francois, Emeraud, Thierry, Negru, Razvan, Huet, Karim, Uruena, Angel, Aleman, Monica, Meersschaut, Johan, Bender, Hugo, Russell, Richard, John, Joachim, Poortmans, Jef, Merten

Journal:

Progress in Photovoltaics: Research and Applications

Année:

2013

Langue:

english

Fichier:

PDF, 965 KB

english, 2013

30

Intragrain defects in polycrystalline silicon layers grown by aluminum-induced crystallization and epitaxy for thin-film solar cells

Van Gestel, Dries, Gordon, Ivan, Bender, Hugo, Saurel, Damien, Vanacken, Johan, Beaucarne, Guy, Poortmans, Jef

Journal:

Journal of Applied Physics

Année:

2009

Langue:

english

Fichier:

PDF, 1.93 MB

english, 2009

31

Strain mapping of tensiley strained silicon transistors with embedded Si[sub 1ây]C[sub y] source and drain by dark-field holography

HuÌe, Florian, HyÌtch, Martin, Houdellier, Florent, Bender, Hugo, Claverie, Alain

Journal:

Applied Physics Letters

Année:

2009

Langue:

english

Fichier:

PDF, 603 KB

english, 2009

32

Three-Dimensional Observation of the Conductive Filament in Nanoscaled Resistive Memory Devices

Celano, Umberto, Goux, Ludovic, Belmonte, Attilio, Opsomer, Karl, Franquet, Alexis, Schulze, Andreas, Detavernier, Christophe, Richard, Olivier, Bender, Hugo, Jurczak, Malgorzata, Vandervorst, Wilfrie

Journal:

Année:

2014

Langue:

english

Fichier:

PDF, 4.46 MB

english, 2014

33

Growth techniques to reduce V-defect density in GaN and AlGaN layers grown on 200 mm Si (111) substrate

Liang, Hu, Saripalli, Yoga, Kandaswamy, Prem Kumar, Carlson, Eric Porter, Favia, Paola, Richard, Olivier, Bender, Hugo, Zhao, Ming, Thapa, Sarad Bahadur, Vancoille, Eric

Journal:

Physica status solidi

Année:

2014

Langue:

english

Fichier:

PDF, 796 KB

english, 2014

34

AlGaN/GaN/AlGaN Double Heterostructures Grown on 200 mm Silicon (111) Substrates with High Electron Mobility

Cheng, Kai, Liang, Hu, Hove, Marleen Van, Geens, Karen, Jaeger, Brice De, Srivastava, Puneet, Kang, Xuanwu, Favia, Paola, Bender, Hugo, Decoutere, Stefaan, Dekoster, Johan, Borniquel, Jose Ignacio del

Journal:

Applied Physics Express

Année:

2012

Langue:

english

Fichier:

PDF, 1.96 MB

english, 2012

35

[IEEE 2014 7th International Silicon-Germanium Technology and Device Meeting (ISTDM) - Singapore, Singapore (2014.6.2-2014.6.4)] 2014 7th International Silicon-Germanium Technology and Device Meeting (ISTDM) - Strained Ge FinFET structures fabricated by selective epitaxial growth

Loo, Roger, Jianwu Sun,, Witters, Liesbeth, Hikavyy, Andriy, Vincent, Benjamin, Shimura, Yosuke, Favia, Paola, Richard, Olivier, Bender, Hugo, Vandervorst, Wilfried, Collaert, Nadine, Thean, Aaron

Année:

2014

Langue:

english

Fichier:

PDF, 919 KB

english, 2014

36

[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Selective Epitaxial Growth of Germanium on Si Wafers with Shallow Trench Isolation: An Approach for Ge Virtual Substrates

Wang, Gang, Leys, Frederik E., Souriau, Laurent, Loo, Roger, Caymax, Matty, Brunco, David P., Geypen, Jef, Bender, Hugo, Meuris, Marc, Vandervorst, Wilfried, Heyns, Marc M.

Année:

2008

Langue:

english

Fichier:

PDF, 645 KB

english, 2008

37

[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - SiCP Selective Epitaxial Growth in Recessed Source/Drain Regions yielding to Drive Current Enhancement in n-channel MOSFET

Bauer, Matthias, Machkaoutsan, Vladimir, Zhang, Yangting, Weeks, Doran, Spear, Jennifer, Thomas, Shawn, Verheyen, Peter, Kerner, C., Clemente, F., Bender, Hugo, Shamiryan, D., Loo, Roger, Hikavyy, A.,

Année:

2008

Langue:

english

Fichier:

PDF, 1.10 MB

english, 2008

38

Direct Mapping of Strain in a Strained Silicon Transistor by High-Resolution Electron Microscopy

Hüe, Florian, Hÿtch, Martin, Bender, Hugo, Houdellier, Florent, Claverie, Alain

Journal:

Physical Review Letters

Année:

2008

Langue:

english

Fichier:

PDF, 1.42 MB

english, 2008

39

[IEEE 2008 9th International Conference on Ultimate Integration on Silicon (ULIS) - Udine, Italy (2008.03.12-2008.03.14)] 2008 9th International Conference on Ultimate Integration of Silicon - Strain mapping in MOSFETs by transmission electron microscopy

Hue, Florian, Hytch, Martin, Houdellier, Florent, Lou, Nelson, Bender, Hugo, Claverie, Alain

Année:

2008

Langue:

english

Fichier:

PDF, 759 KB

english, 2008

40

Doped Embedded $\hbox{Si}_{1 - x}\hbox{C}_{x}$ S/D Stressors With up to 1.5% Substitutional Carbon Content Grown Using a Novel Deposition Process

Verheyen, Peter, Machkaoutsan, Vladimir, Bauer, Matthias, Weeks, Doran, Kerner, Christoph, Clemente, Francesca, Bender, Hugo, Shamiryan, Denis, Loo, Roger, Hoffmann, Thomas, Absil, Philippe, Biesemans

Journal:

IEEE Electron Device Letters

Année:

2008

Langue:

english

Fichier:

PDF, 209 KB

english, 2008

41

[IEEE 2010 IEEE International Reliability Physics Symposium - Garden Grove (Anaheim), CA, USA (2010.05.2-2010.05.6)] 2010 IEEE International Reliability Physics Symposium - Degradation and failure analysis of copper and tungsten contacts under high fluence stress

Kauerauf, Thomas, Butera, Geni, Croes, Kristof, Demuynck, Steven, Wilson, Christopher J., Roussel, Philippe, Drijbooms, Chris, Bender, Hugo, Lofrano, Melina, Vandevelde, Bart, Tokei, Zsolt, Groeseneke

Année:

2010

Langue:

english

Fichier:

PDF, 3.17 MB

english, 2010

42

Photovoltage versus microprobe sheet resistance measurements on ultrashallow structures

Clarysse, Trudo, Moussa, Alain, Parmentier, Brigitte, Bogdanowicz, Janusz, Vandervorst, Wilfried, Bender, Hugo, Pfeffer, Markus, Schellenberger, Martin, Nielsen, Peter F., Thorsteinsson, Sune, Lin, Ro

Journal:

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures

Année:

2010

Langue:

english

Fichier:

PDF, 682 KB

english, 2010

43

Interaction of a Ti-capped Co thin film with Si[sub 3]N[sub 4]

Li, Hua, Bender, Hugo, Conard, Thierry, Maex, Karen, Gutakovskii, Anton, Van Landuyt, Jozef, Froyen, Ludo

Journal:

Applied Physics Letters

Année:

2000

Langue:

english

Fichier:

PDF, 538 KB

english, 2000

44

[IEEE 2014 IEEE International Reliability Physics Symposium (IRPS) - Waikoloa, HI, USA (2014.6.1-2014.6.5)] 2014 IEEE International Reliability Physics Symposium - Impact of Cu TSVs on BEOL metal and dielectric reliability

Li, Yunlong, Croes, Kristof, Nabiollahi, Nabi, Van Huylenbroeck, Stefaan, Gonzalez, Mario, Velenis, Dimitrios, Bender, Hugo, Jourdain, Anne, Pantouvaki, Marianna, Stucchi, Michele, Vanstreels, Kris, V

Année:

2014

Langue:

english

Fichier:

PDF, 2.00 MB

english, 2014

45

Hafnium oxide films by atomic layer deposition for high-κ gate dielectric applications: Analysis of the density of nanometer-thin films

Puurunen, Riikka L., Delabie, Annelies, Van Elshocht, Sven, Caymax, Matty, Green, Martin L., Brijs, Bert, Richard, Olivier, Bender, Hugo, Conard, Thierry, Hoflijk, Ilse, Vandervorst, Wilfried, Hellin,

Journal:

Applied Physics Letters

Année:

2005

Langue:

english

Fichier:

PDF, 385 KB

english, 2005

46

Molecular Beam Epitaxial Growth of Bulk A l A s 0.16S b 0.84 and A l A s 0.16S b 0.84 / I n A s Superlattices on Lattice-Matched InAs Substrates

Németh, Štefan, Grietens, Bob, Bender, Hugo, Borghs, Gustaaf

Journal:

Japanese Journal of Applied Physics

Année:

1997

Fichier:

PDF, 664 KB

1997

47

ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - (Invited) Nano-Beam Diffraction: Crystal Structure and Strain Analysis at the Nanoscale

Favia, Paola, Popovici, Mihaela, Eneman, G., Wang, Gang, Bargallo-Gonzalez, Mireia, Simoen, Eddy, Menou, Nicolas, Bender, Hugo

Année:

2010

Langue:

english

Fichier:

PDF, 6.18 MB

english, 2010

48

Stuffing-enabled surface confinement of silanes used as sealing agents on CF4 plasma-exposed 2.0 p-OSG films

Sun, Yiting, Levrau, Elisabeth, Zhang, Liping, Geypen, Jef, Meersschaut, Johan, Franquet, Alexis, Le, Quoc Toan, de Marneffe, Jean-François, Bender, Hugo, Struyf, Herbert, Detavernier, Christophe, Bak

Journal:

Microelectronic Engineering

Année:

2015

Langue:

english

Fichier:

PDF, 1.55 MB

english, 2015

49

Root-Cause Failure Analysis of Photocurrent Loss in Polythiophene:Fullerene-Based Inverted Solar Cells

Voroshazi, Eszter, Uytterhoeven, Griet, Cnops, Kjell, Conard, Thierry, Favia, Paola, Bender, Hugo, Muller, Robert, Cheyns, David

Journal:

ACS Applied Materials & Interfaces

Année:

2015

Langue:

english

Fichier:

PDF, 1.65 MB

english, 2015

50

ECS Transactions [ECS 217th ECS Meeting - Vancouver, Canada (April 25 - April 30, 2010)] - (Invited) Exploring the ALD Al

Lin, Dennis, Waldron, Niamh, Brammertz, Guy, Martens, Koen, Wang, Wei-E, Sioncke, Sonja, Delabie, Annelies, Bender, Hugo, Conard, Thierry, Tseng, W. H., Lin, J.C., Temst, Kristiaan, Vantomme, Andre, M

Année:

2010

Langue:

english

Fichier:

PDF, 746 KB

english, 2010